Vacuum Load Lock Door

The top port of the load lock chamber mechanism is usually sealed by a viton gasket.

Vacuum load lock door.

See quick access doors section vacuum range. Bolt kits for quick access doors with clearance holes. For complete instructions and parts needed to fix your door locks and other related vacuum problems go here. For conversion tables click here.

Viewport fitted doors are constructed with corning type 7056 glass fused to a kovar nickel iron transition sleeve. Home motion manipulation manipulation load lock systems bolt kits for quick access doors with clearance holes. Viewport fitted doors are constructed with corning type 7056 glass fused to a kovar nickel iron transition sleeve. Ln 2 cooling or heating samples up to 600 c.

Fast entry access load lock doors hardware replacement parts contact us to contact someone directly please click here or call 1 412 387 9200 to get in contact with your dedicated sales team. Offered in a wide range of uhv flange sizes with or without viewport glass. Precision hinged access doors seal with a fluorocarbon o ring. 1x10 10 torr temperature range 20ºc to 150ºc magnets must be removed for 150ºc rating.

30ºc maximum when attached. For load lock and process chamber isolation in semiconductor production systems for 200 and 300 mm wafers. A range of options exist for e g. 022 transfer valve monovat direct for load lock and process chamber isolation in semiconductor production systems for 200 300 and 450 mm wafers.

Description quick access doors provide convenient and fast manual loading of samples in and out of vacuum chambers. The chambers are equipped with uhv connecting flanges and additional ports for future versatility. Enable quick and convenient access into vacuum vessels such as process chambers and load locks. Load lock chambers are provided with a six inch cf flange for mounting to the gate valve a six inch add a door with 7056 glass viewport a 2 75 inch cf flange for attachment of the linear feedthrough and two 2 75 inch cf flanges for pumping.

Doors are hinged and fitted with a swingaway hand knob locking mechanism. They are designed for base pressures between 1x10 7 mbar and 1x10 9 mbar. All access doors are supplied with viton elastomer seals suitable for high vacuum service.